Concepedia

Microelectromechanical Sensor Materials

Microelectromechanical Sensor Materials is a class of functional materials engineered for integration into microelectromechanical systems (MEMS) that transduce mechanical, thermal, or chemical stimuli into electrical signals through miniaturized, semiconductor-based structures.

101

Publications

5.7K

Citations

455

Authors

165

Institutions

Publications per year

2017–2026

26

Variants

Mems Sensor Materials

Parents

Publications

101

Materials issues in microelectromechanical systems (MEMS)

S.M. Spearing · Acta Materialia · 2000 · 652 citations

, , +14

Evaluation of MEMS materials of construction for implantable medical devices

Geoffrey Kotzar, Mark Freas, Phillip B. Abel et al. · Biomaterials · 2002 · 433 citations

, , +14

Recent Developments in Polymer MEMS

C. Liu · Advanced Materials · 2007 · 418 citations

, , +17

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A. Zorman · Thin Solid Films · 1999 · 320 citations

, , +14

Diamond and diamond-like carbon MEMS

Jikui Luo, Yongqing Fu, Huirong Le et al. · Journal of Micromechanics and Microengineering · 2007 · 227 citations

, , +17

1–5 of 101

Authors

455

  1. EV
    Erik Vilain Thomsen

    Technical University of Denmark, Denmark

    4 publications · 146 citations

    4

    h-index

  2. GG
    Grégory Guisbiers

    University of Arkansas at Little Rock, United States

    2 publications · 40 citations

    2

    h-index

  3. HI
    Hiroyuki Ito

    Tokyo Institute of Technology, Japan

    2 publications · 39 citations

    2

    h-index

  4. TL
    T. Lalinský

    Institute of Electrical Engineering of the Slovak Academy of Sciences, Slovakia

    2 publications · 59 citations

    2

    h-index

  5. DM
    Dean M. Aslam

    Michigan State University, United States

    2 publications · 163 citations

    2

    h-index

1–5 of 455

Institutions

165

  1. Chinese Academy of Sciences

    Beijing, China

    5 h-index

    14 publications

    504 citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    5 h-index

    20 publications

    802 citations

  3. Technical University of Denmark

    Kongens Lyngby, Denmark

    4 h-index

    12 publications

    410 citations

  4. State Key Laboratory of Transducer Technology

    Shanghai, China

    4 h-index

    13 publications

    759 citations

  5. Sandia National Laboratories

    Albuquerque, United States

    4 h-index

    16 publications

    1.1K citations

  6. Case Western Reserve University

    Cleveland, United States

    3 h-index

    6 publications

    1.5K citations

  7. The University of Tokyo

    Tokyo, Japan

    3 h-index

    3 publications

    73 citations

  8. University of Cambridge

    Cambridge, United Kingdom

    3 h-index

    7 publications

    1K citations

1–8 of 165

Venues

  1. Sensors and Actuators A Physical

    18 publications · 823 citations

    16

    h-index

  2. Microsystem Technologies

    9 publications · 185 citations

    9

    h-index

  3. Microelectronic Engineering

    5 publications · 236 citations

    5

    h-index

  4. Sensors and Actuators B Chemical

    4 publications · 165 citations

    4

    h-index

  5. Thin Solid Films

    3 publications · 375 citations

    3

    h-index

1–5