Concepedia

Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

H.A.C. Tilmans, S. Bouwstra, J.H.J. Fluitman, Scott L. Spence

Sensors and Actuators A Physical · 1990 · 13 citations · 13 references

Open access

Concepts

EngineeringMaterials ScienceMechanical EngineeringMechanical DesignMicroelectromechanical SystemsSensorsMechanical MeasurementMechanical SensorsMems SensorsMicroelectromechanical SensorsStrain MeasurementStrain SensorsEmbedded Strain SensorsMechanical SensingMicroelectromechanical Strain SensorsMicromachined SensorsResonant Strain SensorsStrain Gauge MeasurementStrain Gauge Sensors

References

13

Miniaturization of Tuning Forks

W.E. Newell · Science · 1968 · 304 citations

Engineering, Bioengineering, Microelectromechanical Systems +2

Resonant-microbridge vapor sensor

Roger T. Howe, R.S. Muller · IEEE Transactions on Electron Devices · 1986 · 223 citations

Engineering, Electrical Engineering, Materials Science +16

Resonator sensors-a review

Robert M. Langdon · Journal of Physics E Scientific Instruments · 1985 · 215 citations

Engineering, Materials Engineering, Materials Science +17

The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers

H. Guckel, J.J. Sniegowski, Todd R. Christenson et al. · Sensors and Actuators A Physical · 1990 · 144 citations

Engineering, Materials Engineering, Materials Science +13

Etched silicon vibrating sensor

J. C. Greenwood · Journal of Physics E Scientific Instruments · 1984 · 118 citations

Engineering, Electrical Engineering, Mechanical Engineering +17