Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Hafnia and hafnia-toughened ceramics

J. Wang, H. P. Li, R. Stevens · Journal of Materials Science · 1992 · 584 citations

Natural Sciences, Materials Engineering, Materials Science +12

Morphology and structure of TiO2 thin films grown by atomic layer deposition

Jaan Aarik, Aleks Aidla, Teet Uustare et al. · Journal of Crystal Growth · 1995 · 302 citations

Natural Sciences, Materials Engineering, Materials Science +14

Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films

Jaan Aarik, Aleks Aidla, Alma‐Asta Kiisler et al. · Thin Solid Films · 1999 · 287 citations

Natural Sciences, Materials Science, Physics +16

Tailoring the dielectric properties of HfO2–Ta2O5 nanolaminates

Kaupo Kukli, Jarkko Ihanus, Mikko Ritala et al. · Applied Physics Letters · 1996 · 224 citations

Natural Sciences, Materials Engineering, Materials Science +17

Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, Lauri Niinistö et al. · Thin Solid Films · 1994 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +14