Formation of an ohmic electrode in SiC using a pulsed laser irradiation method

Osamu Eryu, Takayuki Kume, Kenshiro Nakashima, Toshitake Nakata, Morio Inoue

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 10 citations · 7 references

Concepts

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