Toshitake Nakata

The effects of N+ dose in implantation into 6h-sic epilayers

Tsunenobu Kimoto, Akira Itoh, Hiroyuki Matsunami et al. · Journal of Electronic Materials · 1995 · 73 citations

Ion Implantation, N+ Dose, Medicine +3

Aluminum and boron ion implantations into 6H-SiC epilayers

Tsunenobu Kimoto, Akira Itoh, Hiroyuki Matsunami et al. · Journal of Electronic Materials · 1996 · 65 citations

Materials Science, Materials Engineering, Ion Implantation +5

Recrystallization of MeV Si implanted 6H-SiC

Shinsuke Harada, Manabu Ishimaru, Teruaki Motooka et al. · Applied Physics Letters · 1996 · 33 citations

Materials Science, Materials Engineering, Recrystallized Layer +11

Simultaneous mass-analyzed positive and negative low-energy ion beam deposition apparatus

Y. Horino, Nobuteru Tsubouchi, Kanenaga Fujii et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 27 citations

Ion Implantation, Physics, Applied Physics +4

Fabrication of SiC Blue LEDs Using Off-Oriented Substrates

Yasuhiko Matsushita, Toshitake Nakata, T. Uetani et al. · Japanese Journal of Applied Physics · 1990 · 26 citations

Materials Engineering, Materials Science, Electrical Engineering +12