Publication | Closed Access
Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
103
Citations
28
References
2007
Year
Materials ScienceElectrical EngineeringEngineeringMetal ElectrodeSurface ElectrochemistrySurface ScienceApplied PhysicsElectrical CharacterizationChemical DepositionElectrochemical InterfaceChemical Vapor DepositionElectrochemistry
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