Publication | Closed Access
Low parasitic resistance contacts for scaled ULSI devices
52
Citations
39
References
1998
Year
Electrical EngineeringEngineeringAdvanced Packaging (Semiconductors)MicrofabricationScaled Ulsi DevicesSemiconductor Device FabricationElectronic PackagingMicroelectronicsInterconnect (Integrated Circuits)Electromagnetic Compatibility
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