Concepedia

R. L. Mattis

RL

Statistics

Publications

3

Citations

479

H-Index

3

Active since

1977

Affiliations

National Institute of Standards and Technology(Current)

R. L. Mattis is an author at National Institute of Standards and Technology specializing in engineering, electrical engineering, and applied physics.

Top concepts

Publications per year

1977–1980

3

Publications

3

Resistivity‐Dopant Density Relationship for Phosphorus‐Doped Silicon

W. R. Thurber, R. L. Mattis, Y. M. Liu et al. · Journal of The Electrochemical Society · 1980 · 246 citations · Full text

, , +13

Resistivity‐Dopant Density Relationship for Boron‐Doped Silicon

W. R. Thurber, R. L. Mattis, Y. M. Liu et al. · Journal of The Electrochemical Society · 1980 · 210 citations

, , +11

A comparison of electrical and visual alignment test structures for evaluating photomask alignment in integrated circuit manufacturing

Thomas J. Russell, Thomas F Leedy, R. L. Mattis · 1977 · 23 citations

, , +9

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