Concepedia

Amorphous silicon carbide and its application in silicon micromachining

Armin Klumpp, U. Schaber, H.L. Offereins, K. Kühl, H. Sandmaier

Sensors and Actuators A Physical · 1994 · 53 citations · 3 references

DOI

Concepts

References

3

Artificial Heart Valves: Improved Blood Compatibility by PECVD a‐SiC:H Coating

A. Bolz, M. Schaldach · Artificial Organs · 1990 · 86 citations

, , +17

A thin film bolometer using porous silicon technology

Walter Lang, Peter Steiner, U. Schaber · Sensors and Actuators A Physical · 1994 · 36 citations

, , +12

Amorphous silicon carbide films by plasma-enhanced chemical vapor deposition

Le Tong, Mehran Mehregany, William C. Tang · 2002 · 14 citations

, , +17