U. Schaber

Amorphous silicon carbide and its application in silicon micromachining

Armin Klumpp, U. Schaber, H.L. Offereins et al. · Sensors and Actuators A Physical · 1994 · 53 citations

Materials Science, Materials Engineering, Engineering +7

A thin film bolometer using porous silicon technology

Walter Lang, Peter Steiner, U. Schaber · Sensors and Actuators A Physical · 1994 · 36 citations

Materials Science, Engineering, Microfabrication +7

Surface acoustic wave devices and applications in liquid sensing

Anton Leidl, I Oberlack, U. Schaber et al. · Smart Materials and Structures · 1997 · 25 citations

<title>Advanced silicon trench etching in MEMS applications</title>

Karl Kuehl, Steffan Vogel, U. Schaber et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 23 citations

Electrical Engineering, Engineering, Microfabrication +14

A monolithically integrated sensor system using sensor-specific CMOS cells

Julian Weber, Stefan Seitz, U. Steger et al. · Sensors and Actuators A Physical · 1995 · 11 citations

Electrical Engineering, Engineering, Mixed-signal Integrated Circuit +5