Concepedia

Steffan Vogel

SV

1

Publications

23

Citations

1

H-Index

1998

Active since

Affiliations

Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology(Current)

Steffan Vogel is an author at Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology specializing in electrical engineering, microelectronics, and technology.

Top concepts

TechnologyEngineeringApplied PhysicsSurface ScienceMicroelectronicsMicrofabricationElectronic PackagingElectrical Engineering

Publications per year

1998–1998

1

Publications

1

<title>Advanced silicon trench etching in MEMS applications</title>

Karl Kuehl, Steffan Vogel, U. Schaber et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 23 citations

Electrical Engineering, Engineering, Microfabrication +14

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