K. Kühl

Fabrication of Non‐Underetched Convex Corners in Anisotropic Etching of (100)‐Silicon in Aqueous  KOH  with Respect to Novel Micromechanic Elements

G. K. Mayer, H.L. Offereins, H. Sandmaier et al. · Journal of The Electrochemical Society · 1990 · 115 citations

Engineering, Mechanical Engineering, New Applications +17

A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges

H. Sandmaier, K. Kühl · IEEE Transactions on Electron Devices · 1993 · 104 citations

Engineering, Rectangular Central Boss, Mechanical Engineering +22

Methods for the fabrication of convex corners in anisotropic etching of (100) silicon in aqueous KOH

H.L. Offereins, K. Kühl, H. Sandmaier · Sensors and Actuators A Physical · 1990 · 77 citations

Materials Science, Engineering, Microfabrication +10

Amorphous silicon carbide and its application in silicon micromachining

Armin Klumpp, U. Schaber, H.L. Offereins et al. · Sensors and Actuators A Physical · 1994 · 53 citations

Materials Science, Materials Engineering, Engineering +7

Corner compensation techniques in anisotropic etching of

H. Sandmaier, H.L. Offereins, K. Kühl et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 1991 · 25 citations

Geometric Modeling, Engineering, Geometric Algorithm +15