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New methods for measuring mechanical properties of thin films in micromachining: Beam pull-in voltage (VPI) method and long beam deflection (LBD) method

Materials ScienceEngineeringMicromechanicsMechanical PropertiesMicrofabricationMechanicsMicromachinesMechanical EngineeringApplied PhysicsNew MethodsMicroactuatorThin FilmsMechanics Of MaterialsMicro-electromechanical System