Applied Surface Science · 2010 · 48 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsElectronic MaterialsMicroelectronicsDevice CharacterizationDielectric MaterialsDielectric PropertiesDielectricsSemiconductor Device MaterialsThin Film Electrical PropertiesDielectric CharacterizationDielectric-semiconductor InterfacesGate Dielectric EngineeringGate DielectricsGate OxidesHigh-k DielectricsOxide Dielectrics
20