Concepedia

Publication | Closed Access

Influence of substrate temperature on titanium oxynitride thin films prepared by reactive sputtering

DOI

58

Citations

26

References

2004

Year

J.M. Chappé, Nicolas Martin, J.F. Pierson, G. Terwagne, Jan Lintymer, Joseph Gavoille, J. Takadoum
Applied Surface Science

References

YearCitations

Page 1