Publication | Closed Access
Correlation between processing and properties of TiOxNy thin films sputter deposited by the reactive gas pulsing technique
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Citations
29
References
2001
Year
Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied PhysicsTioxny Thin FilmsThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing
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