Optics Express · 2009 · 31 citations · 16 references
EngineeringAerospace EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationSpacecraft DesignElectrostatic ActuationMems CharacterizationMems DesignMems ModelingMems ReliabilityMems TestingCharging EffectsEarth Observation SensorsElectrostatic MicromirrorsMechanical Testing Of Mems DevicesMems MicromirrorsMicromirrorsShock Testing Of Mems DevicesVibration Testing Of Mems Devices
This paper describes MEMS micromirror characterization in space environments associated with our space applications in earth observation from the International Space Station and earth's orbit satellite. The performance of the micromirror was tested for shock and vibration, stiction, outgassing from depressurization and heating, and electrostatic charging effects. We demonstrated that there is no degradation of the micromirror performance after the space environment tests. A test bed instrument equipped with the micromirrors was delivered and tested in the ISS. The results demonstrate that the proposed micromirrors are suitable for optical space systems.
16
A MEMS-based projection display
Peter F. Van Kessel, Larry J. Hornbeck, Reto Meier et al. · Proceedings of the IEEE · 1998 · 614 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15