High voltage electron beam lithography

Proximity effect in electron-beam lithography

T. H. P. Chang · Journal of Vacuum Science and Technology · 1975 · 533 citations

Engineering, Electrical Engineering, Computational Electromagnetics +9

Corrections to proximity effects in electron beam lithography. I. Theory

Mihir Parikh · Journal of Applied Physics · 1979 · 130 citations

Engineering, Electrical Engineering, Computational Physics +11

High resolution, steep profile resist patterns

J. M. Moran, D. Maydan · Journal of Vacuum Science and Technology · 1979 · 116 citations

Natural Sciences, Materials Engineering, Materials Science +15

Model for Exposure of Electron-Sensitive Resists

James S. Greeneich, T. Van Duzer · Journal of Vacuum Science and Technology · 1973 · 33 citations

Engineering, Electrical Engineering, Materials Science +13

Recent developments in electron-resist evaluation techniques

M. Hatzakis · Journal of Vacuum Science and Technology · 1975 · 27 citations

Engineering, Electrical Engineering, Electronic Materials +12