Tadahiro Takigawa

High-Accuracy Proximity Effect Correction for Mask Writing

Takayuki Abe, Yoshiaki Hattori, Tomohiro Iijima et al. · Japanese Journal of Applied Physics · 2007 · 32 citations

Engineering, Computer Science, Computational Electromagnetics +12

Resist heating effect in direct electron beam writing

Takayuki Abe, Kenji Ohta, H. Wada et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 28 citations

Engineering, Electrical Engineering, Electronic Materials +8

Grain growth of polycrystalline silicon films on SiO2 by cw scanning electron beam annealing

Kenji Shibata, Tomoyasu Inoue, Tadahiro Takigawa et al. · Applied Physics Letters · 1981 · 26 citations

Engineering, Materials Engineering, Materials Science +17

A rewiring technique for integrated circuit operation analysis using a silicon oxide film deposited by a focused ion beam

Haruki Komano, Hiroko Nakamura, Tadahiro Takigawa · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 23 citations

Engineering, Computer Engineering, Electrical Engineering +14

Silicon Oxide Film Formation by Focused Ion Beam (FIB)-Assisted Deposition

Haruki Komano, Youji Ogawa, Tadahiro Takigawa · Japanese Journal of Applied Physics · 1989 · 20 citations

Engineering, Materials Engineering, Materials Science +17