Concepedia

James S. Greeneich

JS

Statistics

Publications

11

Citations

459

H-Index

11

Active since

1972

Affiliations

General Motors (United States)(Current)

University of California, Berkeley

Burroughs Wellcome Fund

James S. Greeneich is an author at General Motors (United States) specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsPhysicsMaterial ScienceElectrical EngineeringChemistryPolymer ScienceElectrical InsulationComputational Chemistry

Publications per year

1972–2000

11

Publications

11

Developer Characteristics of Poly‐(Methyl Methacrylate) Electron Resist

James S. Greeneich · Journal of The Electrochemical Society · 1975 · 148 citations

Materials Science, Solubility Rate, Engineering +15

An exposure model for electron-sensitive resists

James S. Greeneich, T. Van Duzer · IEEE Transactions on Electron Devices · 1974 · 80 citations

Electrical Engineering, Engineering, Specific Resistance +15

Time evolution of developed contours in poly-(methyl methacrylate) electron resist

James S. Greeneich · Journal of Applied Physics · 1974 · 41 citations

Engineering, Electron-beam Lithography, Electron Diffraction +21

Solubility Rate of Poly-(Methyl Methacrylate), PMMA, Electron-Resist

James S. Greeneich · Journal of The Electrochemical Society · 1974 · 39 citations

Materials Science, Solubility Rate, Engineering +7

Model for Exposure of Electron-Sensitive Resists

James S. Greeneich, T. Van Duzer · Journal of Vacuum Science and Technology · 1973 · 33 citations

Electrical Engineering, Engineering, Specific Resistance +13

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