Concepedia

Mihir Parikh

MP

Statistics

Publications

11

Citations

503

H-Index

11

Active since

1975

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

University of California, Santa Barbara

IBM (United States)

Mihir Parikh is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsComputational ElectromagneticsMicroelectronicsNatural SciencesMicroscopyChemistrySurface ScienceElectrical Engineering

Publications per year

1975–2021

11

Publications

11

Corrections to proximity effects in electron beam lithography. I. Theory

Mihir Parikh · Journal of Applied Physics · 1979 · 130 citations

Engineering, Electron-beam Lithography, Electron Diffraction +16

Energy deposition functions in electron resist films on substrates

Mihir Parikh, David F. Kyser · Journal of Applied Physics · 1979 · 101 citations

Electron Resist Films, Engineering, Electron-beam Lithography +18

Self-consistent proximity effect correction technique for resist exposure (SPECTRE)

Mihir Parikh · Journal of Vacuum Science and Technology · 1978 · 90 citations

Engineering, Electron-beam Lithography, Measurement +17

Corrections to proximity effects in electron beam lithography. II. Implementation

Mihir Parikh · Journal of Applied Physics · 1979 · 36 citations

Proximity Effect, Engineering, Electron-beam Lithography +14

A Tunneling Spectroscopy Study of Molecular Degradation due to Electron Irradiation

Paul K. Hansma, Mihir Parikh · Science · 1975 · 32 citations

Engineering, Microscopy, Electron Diffraction +20

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