Publication | Closed Access
Process integration of a 27nm, 16Gb Cu ReRAM
54
Citations
4
References
2014
Year
Unknown Venue
Materials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringCu ReramApplied PhysicsComputer ArchitectureComputer EngineeringDamascene CellNv Re-ram ChipMemory DeviceSemiconductor MemoryLine-sac Digit LinesMicroelectronicsMemory ArchitectureMulti-channel Memory Architecture
A 27nm 16Gb Cu based NV Re-RAM chip has been demonstrated. Novel process introduction to enable this technology include a Damascene Cell, Line-SAC Digit Lines filled with Cu, exhumed-silicided array contacts, raised epitaxial arrays, and high-drive buried access devices.
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