Concepedia

Publication | Closed Access

Low temperature spike anneal for Ni-silicide formation

DOI

24

Citations

2

References

2004

Year

A. Lauwers, J. A. Kittl, Mark van Dal, O. Chamirian, Richard Lindsay, M. de Potter, C. Demeurisse, C. Vrancken, Karen Maex, Xavier Llimona i Pagès,
Microelectronic Engineering

References

YearCitations

Page 1