Concepedia

Residual stress of AlN films RF sputter deposited on Si(111) substrate

Hui Zhong, Zhanfei Xiao, Xiangquan Jiao, Jie Yang, Hualei Wang, Rui Zhang, Yu Shi

Journal of Materials Science Materials in Electronics · 2012 · 14 citations · 14 references

DOI

Concepts

References

14

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

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Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text

, , +17

Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering

John A. Thornton, David W. Hoffman · Journal of Vacuum Science and Technology · 1977 · 298 citations

, , +17

Raman Scattering Spectroscopy of Residual Stresses in Epitaxial AlN Films

Shibo Yang, Reina Miyagawa, Hideto Miyake et al. · Applied Physics Express · 2011 · 89 citations

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Relationship between residual stress and structural properties of AlN films deposited by r.f. reactive sputtering

Si‐Hyung Lee, Ki Hyun Yoon, Deok-Soo Cheong et al. · Thin Solid Films · 2003 · 59 citations

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