Optimization of demolding temperature for throughput improvement of nanoimprint lithography

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Polymer Imprint Lithography with Molecular-Scale Resolution

Hua Feng, Yugang Sun, Anshu Gaur et al. · Nano Letters · 2004 · 409 citations

Natural Sciences, Materials Engineering, Materials Science +15

Characterization of 8-in. wafers printed by nanoimprint lithography

C. Perret · Microelectronic Engineering · 2004 · 43 citations

Engineering, Materials Engineering, Materials Science +12

Characterization of 8-in. wafers printed by nanoimprint lithography

C. Perret · Microelectronic Engineering · 2004 · 30 citations

Engineering, Materials Engineering, Materials Science +12

Lattice vibrations and stability of reconstructed (110) noble metal surfaces

I. Vilfan, Frédéric Lançon, Erwan Adam · Surface Science · 1999 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +14