T. Lévéder

Statistics

Publications

Citations

179

H-Index

Active since

2006

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

CEA Grenoble

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Centre National de la Recherche Scientifique

Institut polytechnique de Grenoble

T. Lévéder is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in materials engineering, materials science, and nanoimprint lithography.

Publications per year

2006–2011

Publications

Stamp design effect on 100 nm feature size for 8 inch NanoImprint lithography

S. Landis, N. Chaix, C. Gourgon et al. · Nanotechnology · 2006 · 52 citations

Engineering, Materials Engineering, Materials Science +12

Quantitative characterizations of a nanopatterned bonded wafer: force determination for nanoimprint lithography stamp removal

S. Landis, N. Chaix, C. Gourgon et al. · Nanotechnology · 2008 · 31 citations

Engineering, Materials Engineering, Materials Science +15

Reflow dynamics of thin patterned viscous films

T. Lévéder, S. Landis, Laurent Davoust · Applied Physics Letters · 2008 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +16

Nanoimprint lithography processes on 200mm Si wafer for optical application: Residual thickness etching anisotropy

N. Chaix, C. Gourgon, C. Perret et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 22 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Optimization of demolding temperature for throughput improvement of nanoimprint lithography

T. Lévéder, S. Landis, Laurent Davoust et al. · Microelectronic Engineering · 2007 · 22 citations · Full text

Engineering, Materials Engineering, Materials Science +14

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