N. Chaix

Improved release strategy for UV nanoimprint lithography

Sophie Garidel, M. Zelsmann, N. Chaix et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 57 citations

Engineering, Electron-beam Lithography, Surface Nanotechnology +22

Stamp design effect on 100 nm feature size for 8 inch NanoImprint lithography

S. Landis, N. Chaix, C. Gourgon et al. · Nanotechnology · 2006 · 52 citations

Engineering, Electron-beam Lithography, Nm Feature Size +22

Influence of the molecular weight and imprint conditions on the formation of capillary bridges in nanoimprint lithography

N. Chaix, C. Gourgon, S. Landis et al. · Nanotechnology · 2006 · 33 citations

Engineering, Capillary Bridges, Mechanical Engineering +21

Quantitative characterizations of a nanopatterned bonded wafer: force determination for nanoimprint lithography stamp removal

S. Landis, N. Chaix, C. Gourgon et al. · Nanotechnology · 2008 · 31 citations

Engineering, Mechanical Engineering, Pattern Transfer +22

Tailoring Nanostructures Using Copolymer Nanoimprint Lithography

Pascal Thébault, Stefan Niedermayer, S. Landis et al. · Advanced Materials · 2012 · 25 citations · Full text