Concepedia

Characterization of 8-in. wafers printed by nanoimprint lithography

Microelectronic Engineering · 2004 · 43 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanomaterialsNanotechnology3D PrintingBioprintingFabrication MaterialsNanoimprint LithographySoft LithographySubstrate PreparationLarge-area NanoimprintingMold FabricationThree-dimensional Nanostructuring