Representative Figure Method for Proximity Effect Correction [II]

Abstract

The representative figure method, which was proposed to greatly reduce the proximity effect correction time, is studied in detail in this paper. The method is shown to have a high correction accuracy (the error is 0.25% for a 50 kV acceleration voltage and a 2 µm small area) and a high speed correction time (which includes the time for preparing representative rectangles; 1/10 compared with the conventional method). The basic idea of the present method is found to be applicable to data compaction. The compaction ratio by this method is (1/2)-(1/100) of that by the conventional method. The representative figure method has a wide range of applications and has many advantages.