Concepedia

G. Owen

GO

Statistics

Publications

11

Citations

408

H-Index

10

Active since

1973

Affiliations

Hewlett-Packard (United States)(Current)

Stanford University

G. Owen is an author at Hewlett-Packard (United States) specializing in engineering, applied physics, and microscopy.

Top concepts

EngineeringApplied PhysicsMicroscopyInstrumentationOphthalmologyMicrofabricationMedicineMicroelectronicsElectrical EngineeringPhysics

Publications per year

1973–2005

11

Publications

11

Proximity effect correction for electron beam lithography by equalization of background dose

G. Owen, Paul Rissman · Journal of Applied Physics · 1983 · 114 citations

Engineering, Electron-beam Lithography, Microscopy +16

An exact algorithm for self-calibration of two-dimensional precision metrology stages

J. Ye, Michael T. Takac, C. N. Berglund et al. · Precision Engineering · 1997 · 79 citations · Full text

Engineering, Measurement, Exact Algorithm +21

Methods for proximity effect correction in electron lithography

G. Owen · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 66 citations

Electron-beam Lithography, Microscopy, Radiation Exposure +18

Low voltage alternative for electron beam lithography

Y.-H. Lee, R. Browning, N.I. Maluf et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 42 citations

Engineering, Electron-beam Lithography, Microscopy +16

Electron lithography for the fabrication of microelectronic devices

G. Owen · Reports on Progress in Physics · 1985 · 21 citations

Engineering, Electron-beam Lithography, Microscopy +18

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