Concepedia

Michael T. Takac

MT

3

Publications

120

Citations

3

H-Index

1994

Active since

Affiliations

IBM (United States)(Current)

Stanford University

Hewlett-Packard (United States)

Michael T. Takac is an author at IBM (United States) specializing in precision measurement, calibration, and dimensional metrology.

Top concepts

Publications per year

1994–1997

3

Publications

3

An exact algorithm for self-calibration of two-dimensional precision metrology stages

J. Ye, Michael T. Takac, C. N. Berglund et al. · Precision Engineering · 1997 · 79 citations · Full text

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<title>Self-calibration in one dimension</title>

Michael T. Takac · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 23 citations

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<title>Self-calibration in two dimensions: the experiment</title>

Michael T. Takac, Jun Ye, Michael R. Raugh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 18 citations

, , +17

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