Application of the LIGA technique for the development of microactuators based on electromagnetic principles

Abstract

The high energy density of a magnetic field in the presence of ferromagnetic or permanently magnetized materials offers the potential for conversion of the magnetic field energy into forces or torques useful for microactuator applications. Layers of high permeability materials with a thickness of several hundred microns are to be shaped with high precision in order to fabricate microactuators based on magnetic principles. These requirements are easily met by LIGA technique, which allows the formation of 3D structures with a high aspect ratio by selecting, e.g., nickel-cobalt-iron alloys in the electroforming process. A linear step motor is introduced based on the reluctance principle. Emphasis is put on the evaluation of the equipment and technical aspects of the manufacturing process utilizing the LIGA technique.