Harmonic electrostatic motors

Laterally Driven Polysilicon Resonant Microstructures

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe · Sensors and Actuators · 1989 · 737 citations

Engineering, Materials Engineering, Materials Science +6

Microrobots and micromechanical systems

William S. Trimmer · Sensors and Actuators · 1989 · 410 citations

Engineering, Mechanical Engineering, Robotics Engineering +12

Design considerations for a practical electrostatic micro-motor

William S. Trimmer, K.J. Gabriel · Sensors and Actuators · 1987 · 229 citations

Engineering, Electrical Engineering, Mechatronics Engineering +14

On the rectification of vibratory motion

R. Brockett · Sensors and Actuators · 1989 · 76 citations

Engineering, Physics, Motor Control +7

Microactuators for aligning optical fibers

R. Jebens, William S. Trimmer, James Alfred Walker · Sensors and Actuators · 1989 · 68 citations

Engineering, Materials Engineering, Materials Science +12