Sensors and Actuators · 1989 · 68 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOptical MaterialsOpticsFiber OpticsMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningOptical FibersOptical MemsFiber FabricationMicro-optics AlignmentOptical Fiber Alignment
15
Microrobots and micromechanical systems
William S. Trimmer · Sensors and Actuators · 1989 · 410 citations
Engineering, Mechanical Engineering, Robotics Engineering +12
L. McDonald Schetky · Scientific American · 1979 · 129 citations
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S.C. Jacobsen, Richard H. Price, John Wood et al. · 2003 · 72 citations
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