Concepedia

Micro-optics Alignment

Micro-Optics Alignment is a precision assembly process in optical MEMS that establishes and maintains the optimal spatial relationship between microscale optical components and MEMS structures to ensure efficient light coupling and system performance.

160

Publications

5.3K

Citations

706

Authors

206

Institutions

Publications per year

2017–2026

26

Parents

Publications

160

Sub-micrometre accurate free-form optics by three-dimensional printing on single-mode fibres

Timo Gissibl, Simon Thiele, Alois Herkommer · Nature Communications · 2016 · 348 citations · Full text

, , +17

Micromachining for optical and optoelectronic systems

Ming C. Wu · Proceedings of the IEEE · 1997 · 264 citations

, , +16

Optical MEMS: From Micromirrors to Complex Systems

Olav Solgaard, A. A. Godil, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 2014 · 171 citations · Full text

, , +17

An ultraprecision stage for alignment of wafers in advanced microlithography

Changwoo Lee, Seung‐Woo Kim · Precision Engineering · 1997 · 160 citations

, , +12

Micro-machined three-dimensional micro-optics for integrated free-space optical system

L.Y. Lin, S.S. Lee, Kristofer S. J. Pister et al. · IEEE Photonics Technology Letters · 1994 · 129 citations

, , +16

1–5 of 160

Authors

706

  1. MC
    Ming C. Wu

    University of California, Berkeley, United States

    8 publications · 681 citations

    8

    h-index

  2. LY
    Lih Y. Lin

    University of Washington, United States

    4 publications · 232 citations

    4

    h-index

  3. PD
    Peter Dannberg

    Fraunhofer Institute for Applied Optics and Precision Engineering, Germany

    4 publications · 109 citations

    4

    h-index

  4. YR
    Yang Ren

    Louisiana State University, United States

    3 publications · 75 citations

    3

    h-index

  5. MT
    Michael T. Gale

    Paul Scherrer Institute, Switzerland

    3 publications · 46 citations

    3

    h-index

1–5 of 706

Institutions

206

  1. University of California, Los Angeles

    Los Angeles, United States

    8 h-index

    27 publications

    1.8K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    6 h-index

    29 publications

    765 citations

  3. Fraunhofer Institute for Applied Optics and Precision Engineering

    Jena, Germany

    6 h-index

    26 publications

    756 citations

  4. National Cheng Kung University

    Tainan City, Taiwan

    4 h-index

    8 publications

    190 citations

  5. Chinese Academy of Sciences

    Beijing, China

    4 h-index

    10 publications

    284 citations

  6. Seoul National University

    Seoul, South Korea

    3 h-index

    13 publications

    232 citations

  7. National Tsing Hua University

    Hsinchu, Taiwan

    3 h-index

    9 publications

    180 citations

  8. University of Stuttgart

    Stuttgart, Germany

    3 h-index

    7 publications

    1.4K citations

1–8 of 206

Venues

  1. 12

    h-index

  2. IEEE Photonics Technology Letters

    IPTEL · 12 publications · 478 citations

    12

    h-index

  3. Optics Express

    11 publications · 385 citations

    11

    h-index

  4. Sensors and Actuators A Physical

    7 publications · 226 citations

    7

    h-index

  5. Applied Physics Letters

    6 publications · 162 citations

    6

    h-index

1–5