SIMS depth profiling of advanced gate dielectric materials

Beam-induced broadening effects in sputter depth profiling

K. Wittmaack · Vacuum · 1984 · 161 citations

Natural Sciences, Materials Science, Physics +8

Secondary ion mass spectrometry depth profiling of boron, antimony, and germanium deltas in silicon and implications for profile deconvolution

M. G. Dowsett, R. D. Barlow, H. Fox et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +15

Nitrogen content of oxynitride films on Si(100)

Hong Tang, W. N. Lennard, M. Zinke-Allmang et al. · Applied Physics Letters · 1994 · 34 citations

Natural Sciences, Chemistry, Materials Science +17