Carolyn Gondran

SIMS depth profiling of advanced gate dielectric materials

J. Bennett, Carolyn Gondran, Chris Sparks et al. · Applied Surface Science · 2002 · 20 citations

Engineering, Electrical Engineering, Materials Science +14

On the reliability of SIMS depth profiles through HfO2-stacks

W. Vandervorst, J. Bennett, Cedric Huyghebaert et al. · Applied Surface Science · 2004 · 15 citations

Engineering, Electrical Engineering, Semiconductor Devices +3

Process and Manufacturing Challenges for High-K Gate Stack Systems

Mark Gilmer, T-Y Luo, Howard R. Huff et al. · MRS Proceedings · 1999 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Characterization of high-k gate dielectric and metal gate electrode semiconductor samples with a total reflection X-ray fluorescence spectrometer

Chris Sparks, Meredith Beebe, J. Bennett et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2004 · 11 citations

Engineering, Materials Engineering, Materials Science +16

X-ray reflectometry and x-ray fluorescence monitoring of the atomic layer deposition process for high-k gate dielectrics

P. Y. Hung, Carolyn Gondran, Amiya R. Ghatak-Roy et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +17