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On the reliability of SIMS depth profiles through HfO2-stacks

W. Vandervorst, J. Bennett, Cedric Huyghebaert, Thierry Conard, Carolyn Gondran, H. De Witte

Applied Surface Science · 2004 · 15 citations · 1 references

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References

1

Ion-bombardment artifact in TOF-SIMS analysis of ZrO2/SiO2/Si stacks

H. De Witte, Thierry Conard, Wilfried Vandervorst et al. · Applied Surface Science · 2002 · 20 citations

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