Silicon nitride and oxynitride deposition by RT-LPCVD

Influence of crystal structure on the luminescence of ions with s2 configuration

G. Blasse, A. W. M. Braam, M. Heerschop · Journal of Solid State Chemistry · 1977 · 109 citations

Natural Sciences, Chemistry, Materials Science +14

Deposition and composition of silicon oxynitride films

A. E. T. Kuiper, S. W. Koo, F.H.P.M. Habraken et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ultrathin silicon nitride films prepared by combining rapid thermal nitridation with low-pressure chemical vapor deposition

Kota Ando, Akihiko Ishitani, K. Hamano · Applied Physics Letters · 1991 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +17

High-efficiency silicon solar cells by rapid thermal processing

A. Rohatgi, Z. Chen, P. Doshi et al. · Applied Physics Letters · 1994 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +17

Photo-assisted deposition of thin films on III–V semiconductors with UV and IR lamps

Y. I. Nissim, J. M. Moison, F. Houzay et al. · Applied Surface Science · 1990 · 25 citations

Engineering, Materials Engineering, Materials Science +15