Statistics
Publications
12
Citations
224
H-Index
10
Active since
1984
A. Sibaï is an author at Institut National des Sciences Appliquées de Lyon specializing in applied physics, engineering, and materials science.
Publications per year
1984–2012
12
12
Silicon nitride and oxynitride deposition by RT-LPCVD
B. Semmache, M. Lemiti, C. Chaneliere et al. · Thin Solid Films · 1997 · 23 citations
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