Microelectronic Engineering · 2005 · 33 citations · 24 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingMetalsWafer BondingBonding Process OptimizationLow-temperature BondingLow-temperature MaterialsLow-temperature ProcessingWire Bonding
24
Integration challenges of porous ultra low-k spin-on dielectrics
K. Mosig, T. Jacobs, K. Brennan et al. · Microelectronic Engineering · 2002 · 86 citations
Natural Sciences, Materials Engineering, Materials Science +13