Concepedia

Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

P. Petrík, T. Gumprecht, A. Nutsch, Georg Roeder, M. Lemberger, Gergely Juhász, O. Polgár, C. Major, P. Kozma, Milan Janosov,

Thin Solid Films · 2013 · 10 citations · 7 references

DOI

Concepts

References

7

Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Craig M. Herzinger, Blaine Johs, William A. McGahan et al. · Journal of Applied Physics · 1998 · 1.1K citations

, , +23

Handbook of Ellipsometry

Thomas Schweizer · Applied Rheology · 2005 · 469 citations · Full text

Optical Measurement of Film Growth on Silicon and Germanium Surfaces in Room Air

R. J. Archer · Journal of The Electrochemical Society · 1957 · 173 citations

, , +19

Eliminating carbon contamination on oxidized Si surfaces using a VUV excimer lamp

Elisabeth Strein, David D. Allred · Thin Solid Films · 2008 · 35 citations

, , +7

Expanded beam (macro-imaging) ellipsometry

M. Fried, Gergely Juhász, C. Major et al. · Thin Solid Films · 2010 · 26 citations

, , +5