T. Gumprecht

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Active since

2013

Affiliations

Fraunhofer Institute for Integrated Systems and Device Technology(Current)

Schott (Germany)

T. Gumprecht is an author at Fraunhofer Institute for Integrated Systems and Device Technology specializing in materials engineering, materials chemistry, and thin-film deposition.

Publications per year

2013–2015

Publications

Low temperature deposition of silicon nitride using Si3Cl8

S. Riedel, Jonas Sundqvist, T. Gumprecht · Thin Solid Films · 2015 · 35 citations

Engineering, Materials Engineering, Materials Science +12

Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

P. Petrík, T. Gumprecht, A. Nutsch et al. · Thin Solid Films · 2013 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17

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