Georg Roeder

An X-ray photoelectron spectroscopy study of ultra-thin oxynitride films

S. Ladas, L. Sygellou, Michael O. Wolf et al. · Thin Solid Films · 2011 · 16 citations

Materials Science, Engineering, Ultra-thin Oxynitride Films +5

Feasibility Evaluation of Virtual Metrology for the Example of a Trench Etch Process

Georg Roeder, Sirko Winzer, Martin Schellenberger et al. · IEEE Transactions on Semiconductor Manufacturing · 2014 · 14 citations

Virtual Manufacturing, Engineering, Industrial Engineering +19

Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer area

Gülnur Aygün, Georg Roeder, Tobias Erlbacher et al. · Journal of Applied Physics · 2010 · 12 citations · Full text

Engineering, Plasma Physics, Silicon On Insulator +16

Advances in thermal laser separation: process monitoring in a kerf-free laser-based cutting technology to ensure high yield

Mercedes Cerezuela Barreto, Georg Roeder, Maximilian Steinhoff et al. · Procedia CIRP · 2018 · 11 citations · Full text

Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry

P. Petrík, T. Gumprecht, A. Nutsch et al. · Thin Solid Films · 2013 · 10 citations

Materials Science, Surface Characterization, Aluminium Nitride +10