Concepedia

Publication | Closed Access

PECVD silicon carbide as a chemically resistant material for micromachined transducers

DOI

55

Citations

10

References

1998

Year

Anthony F. Flannery, Nicholas J. Mourlas, C.W. Storment, Stan Tsai, Samantha H. Tan, John Heck, Dave Monk, Thomas Kim, Bishnu P. Gogoi, G.T.A. Kovacs
Sensors and Actuators A Physical

References

YearCitations

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