Statistics
Publications
5
Citations
276
H-Index
5
Active since
1996
Affiliations
Stanford University(Current)
Anthony F. Flannery is an author at Stanford University specializing in microelectromechanical sensors, microelectromechanical systems, and engineering.
Publications per year
1996–2004
5
5
PECVD silicon carbide for micromachined transducers
Anthony F. Flannery, Nicholas J. Mourlas, C.W. Storment et al. · 2002 · 26 citations
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