D. Kuhman

Boron doping of diamond thin films

J. Mort, D. Kuhman, M. A. Machonkin et al. · Applied Physics Letters · 1989 · 93 citations

Materials Science, Materials Engineering, Diamond-like Carbon +15

The deposition of diamond films by filament techniques

Frank Jansen, M. A. Machonkin, D. Kuhman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 77 citations

Materials Science, Materials Engineering, Diamond-like Carbon +11

Thermomechanical properties of amorphous silicon and nonstoichiometric silicon oxide films

Frank Jansen, M. A. Machonkin, N. Palmieri et al. · Journal of Applied Physics · 1987 · 43 citations

Materials Engineering, Materials Science, Electrical Engineering +12

Properties of hydrogenated amorphous silicon carbide films prepared by plasma-enhanced chemical vapor deposition

D. Kuhman, S. Grammatica, Frank Jansen · Thin Solid Films · 1989 · 42 citations

Materials Engineering, Materials Science, Engineering +7

Plasma enhanced chemical vapor deposition using forced flow through hollow cathodes

Frank Jansen, D. Kuhman, Charles R. Taber · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 22 citations

Materials Science, Chemical Engineering, Electrical Engineering +15