Device processing and integration of ferroelectric thin films for memory applications

Ferroelectric thin films for electronic applications

Gene H. Haertling · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 266 citations

Natural Sciences, Materials Engineering, Materials Science +15

Integrated ferroelectrics

Carlos A. Paz de Araújo, George W. Taylor · Ferroelectrics · 1991 · 231 citations

Engineering, Electrical Engineering, Materials Science +17

PLZT thin-film waveguides

Takao Kawaguchi, Hideaki Adachi, Kentaro Setsune et al. · Applied Optics · 1984 · 134 citations

Engineering, Electrical Engineering, Materials Science +17

Trends in the development of ULSI DRAM capacitors

P. Fazan · Integrated ferroelectrics · 1994 · 67 citations

Engineering, Materials Engineering, Materials Science +15

Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors

Dilip P. Vijay, Seshu B. Desu, Wei Pan · Journal of The Electrochemical Society · 1993 · 59 citations

Natural Sciences, Materials Engineering, Materials Science +17