Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 266 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsFerroelectric MaterialsOptical Thin FilmsSemiconductor Device MaterialsThin Film Electrical PropertiesThin Film Optical PropertiesThin-film MaterialsFerroelectric Electro-optic MaterialsFerroelectric Random-access MemoryFerroelectric Thin FilmsFerroelectricityNon-volatile Ferroelectric MemoryThin Film Ferroelectrics
This is a review paper on the history of ferroelectric thin films, current practices in their fabrication, characteristics of interest which relate to their use, and the application of these films to memory and electrooptic devices.