H. Macé

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Publications

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Active since

1995

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

H. Macé is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in materials science, ferroelectric thin films, and ferroelectric materials.

Publications per year

1995–1995

Publications

Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma

H. Macé, H. Achard, L. Peccoud · Microelectronic Engineering · 1995 · 24 citations

Natural Sciences, Materials Science, Physics +16

Device processing and integration of ferroelectric thin films for memory applications

H. Achard, H. Macé, L. Peccoud · Microelectronic Engineering · 1995 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

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